Laser lithographic approach to micro-optical freeform elements with extremely large sag heights
نویسندگان
چکیده
منابع مشابه
Micro-optical elements with arbitrary surfaces
We present a comparison of three different technologies for the fabrication of microoptical elements with arbitrary surfaces. We used direct laser writing, binary mask lithography in combination with reactive ion etching, and graytone lithography.
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ژورنال
عنوان ژورنال: Optics Express
سال: 2012
ISSN: 1094-4087
DOI: 10.1364/oe.20.004763